Sensor device

US11073436B2 · kind B2 · utility

Assignees

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE
• IHP GmbH Leibniz-Institut für innovative Mikroelektronik · DE

Inventors

• Giannino Dziallas · Berlin, DE
• Lars Zimmermann · Berlin, DE
• Tolga Tekin · Berlin, DE
• Ha-Duong Ngo · Berlin, DE

Key dates

• Filing date: Dec 9, 2019
• Grant date: Jul 27, 2021
• Expiry date: Dec 9, 2039

Classification

• Technology area (CPC G): Physics
• CPC primary: G01F3/04
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A sensor device including a deflectable membrane made of a 2D nanomaterial, a first optical waveguide for guiding light, disposed adjacent to the membrane and extending along the surface of the membrane at least in a first section, as well as a measuring device for measuring, within the first section the influence of the membrane on an evanescent wave range of the light guided along the first optical waveguide. The influence of the membrane on the light guided in the optical waveguide, in particular on the evanescent wave range of the light, can be measured interferometrically by detecting phasing differences or phase shifts. This allows for a force-free readout of the membrane deflection. By using very thin 2D nanomaterials, the membrane can also react to very quick changes in force.