Patent · US Active

Automated multi-grid handling apparatus

US11075055B2 · kind B2 · utility

2Cited by
0References
22Claims
0Family size

Assignee

Inventor

Key dates

Filing dateMay 11, 2018
Grant dateJul 27, 2021
Priority date
Expiry dateMay 11, 2038

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J2237/2602
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

An automated grid handling apparatus for an electron microscope including a transport module having a multistage shuttle comprising a first shuttle stage having a single degree of freedom of motion and a second shuttle stage having a single degree of freedom of motion independent of the first stage, an end effector connected to at least one of the first and second shuttle stages, the end effector configured to hold a grid carrier and transport the grid carrier into and out of an electron microscope through a transport interface that communicates with a multi-axis positioning stage port of the microscope, the end effector having a range of motion defined by the first and second stage degrees of freedom of motions and the multi-axis positioning stage internal to the electron microscope, and an automated loading module connected to the frame and communicating with the transport module, the automated loading module including a load port module through which grids are loaded into the automated loading and transport modules.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.