Patent · US Active

Positioning device

US11075102B2 · kind B2 · utility

0Cited by

6References

11Claims

0Family size

Assignee

SUSS MICROTEC LITHOGRAPHY GMBH · DE

Inventors

Sven Hansen · Hamburg, DE
Georg Fink · Garching an der Alz, DE
Henrik Petry · Garching bei München, DE

Key dates

Filing date	Nov 8, 2017
Grant date	Jul 27, 2021
Priority date	—
Expiry date	Dec 11, 2037

Classification

Technology area (CPC H)Electricity
CPC primaryH01L2224/94
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

The invention relates to a positioning device for positioning a substrate, in particular a wafer, comprising: a process chamber; a base body; a carrier element which comprises a support for supporting the substrate, the carrier element being arranged above the base body and formed movable in terms of distance from the base body; and a holder for an additional substrate, in particular an additional wafer or a mask, the holder being arranged opposite the carrier element; wherein there is, between the base body and the carrier element, a sealed-off cavity to which a pressure, in particular a negative pressure, can be applied so as to prevent undesired movement of the carrier element as a result of the action of an external force.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.