Display panel and fabrication method thereof

US11075359B2 · kind B2 · utility

Assignee

• WUHAN TIANMA MICROELECTRONICS CO., LTD. · CN

Inventor

• Linshan Guo · 红钢城街道, CN

Key dates

• Filing date: Aug 30, 2019
• Grant date: Jul 27, 2021
• Expiry date: Sep 5, 2039

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10K2102/311

Abstract

A display panel and a fabrication method for forming the display panel are provided. The fabrication method includes providing a substrate disposed with a light-emitting device, and forming a first inorganic material layer. The fabrication method also includes forming a first inorganic layer by thinning the first inorganic material layer, and forming a second inorganic layer. Moreover, the fabrication method includes forming a third layer. The third layer is disposed in a first region. Further, the fabrication method includes patterning the first inorganic layer and the second inorganic layer by a dry etching using the third layer as a mask, while simultaneously thinning the third layer. The first inorganic layer and the second inorganic layer in the first region are retained to form a first inorganic encapsulation layer and a second inorganic encapsulation layer, respectively. The third layer is thinned to form a third encapsulation layer.