Process for controlling, under void, a jet of particles with an aerodynamic lens and associated aerodynamic lens
US11076476B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 16, 2016 |
| Grant date | Jul 27, 2021 |
| Priority date | — |
| Expiry date | Dec 16, 2036 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C24/04
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The invention relates to a method for controlling the divergence of a jet of particles in vacuo with an aerodynamic lens, the aerodynamic lens including at least one chamber; a diaphragm, a so-called inlet diaphragm, intended to form an inlet of the aerodynamic lens for a jet of particles, the inlet diaphragm having a given diameter (d1); and another diaphragm, a so-called outlet diaphragm, intended to form an outlet of the aerodynamic lens for this jet of particles; the method including: a step for generating the jet of particles from the inlet to the outlet, in vacuo, of the aerodynamic lens; and a step for adjusting the diameter (ds) of the outlet diaphragm for controlling the divergence of the jet of particles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.