Photon detector, method for producing a photon detector, and x-ray apparatus

US11076822B2 · kind B2 · utility

Assignee

• Siemens Healthcare Limited · DE

Inventors

• Thorsten ERGLER · Erlangen, DE
• Michael Hosemann · Erlangen, DE

Key dates

• Filing date: Nov 20, 2019
• Grant date: Aug 3, 2021
• Expiry date: Jan 19, 2040

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10F39/811
• WIPO field: Environmental technology
• WIPO sector: Chemistry

Abstract

A photon detector includes at least one sensor element, formed by a semiconductor material and sensitive to incident radiation, forming a pixel array including sensor pixels; and a detector circuit, situated after the sensor element in the direction of incident radiation, to detect charge carriers generated in the semiconductor material as a result of radiation. The detector circuit includes an integrated circuit with detector pixels in signal communication contact with the sensor pixels; and an enclosure surrounding the integrated circuit and in which the integrated circuit is embedded, and on which is formed on a pixel face facing the sensor element. A contact redistribution layer is formed, in which contact pads are formed for signal-communicatively connecting the detector pixels to the correspondingly assigned sensor pixels, and also conductor tracks are formed for connecting the contact pads to the detector pixels of the integrated circuit.