Process system having locking pin and locking pin
US11077535B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 14, 2018 |
| Grant date | Aug 3, 2021 |
| Priority date | — |
| Expiry date | Dec 10, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68707
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A process system of performing a fabrication process on a wafer includes a wafer storage cassette, one or more process chambers, a transfer chamber having a body and a lid that detachably covers the body, and a locking pin. The transfer chamber also includes a robot hub, a robot arm attached to the robot hub, and a blade attached to the robot arm. The body of the transfer chamber is connected to the wafer storage cassette and the process chambers, and the robot arm is configured to transfer a wafer from the wafer storage cassette through the body of the transfer chamber to one or more of the process chambers. The locking pin is configured to detachably attach to the robot arm to constrain the blade at a predetermined position within the transfer chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.