Ultrasonic wave sensor and ultrasonic wave device
US11085816B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 27, 2019 |
| Grant date | Aug 10, 2021 |
| Priority date | — |
| Expiry date | Dec 25, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01H11/08
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An ultrasonic wave sensor includes an oscillating plate including a plurality of oscillators, a wall portion provided on the oscillating plate and surrounding the oscillator, and a piezoelectric element provided on each of the plurality of oscillators. In the oscillating plate, a plurality of piezoelectric elements are electrically connected in plan view as viewed from a thickness direction, and a first area where an input and an output of a drive signal to the piezoelectric element are possible and a second area which is provided on an outer side of the first area and where the piezoelectric element is electrically insulated from the piezoelectric element disposed in the first area are included. In the second area, a distance between the adjacent oscillators is reduced as separated from the first area.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.