Characterization of multilayer structures
US11085874B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 21, 2020 |
| Grant date | Aug 10, 2021 |
| Priority date | — |
| Expiry date | Apr 21, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N22/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for determining characteristics of a structure is disclosed. The method comprises repetitively irradiating the structure with a transient continuous wave electromagnetic radiation and capturing as a function of time a transient part of the reflection or transmission of the transient continuous wave electromagnetic radiation reflected at or transmitted through the different interfaces of layer-based structure. The method furthermore comprises deriving from the transient part of the reflected or transmitted transient continuous wave electromagnetic radiation as function of time information regarding different contributions in the transient part of the reflected or transmitted transient continuous wave electromagnetic radiation stemming from the reflections at different interfaces of the structure and determining from said information at least geometric information and/or electromagnetic properties of the one or more materials of the structure. A corresponding system also is claimed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.