High speed imaging system for measuring target object within sample
US11085875B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Oct 3, 2019 |
| Grant date | Aug 10, 2021 |
| Priority date | — |
| Expiry date | Oct 3, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03H2223/23
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to a high-speed imaging system for measuring a target object within a sample, comprising: a light source emitting a plane wave; an angle-adjustment mirror adjusting an angle of the plane wave emitted from the light source; an optical interferometer dividing the plane wave whose angle was adjusted by the angle-adjustment mirror into a reference wave and a sample wave and forming an interference wave between the reference wave reflected from a reference mirror and the sample wave reflected from the target object; a camera module obtaining the interference wave, and an imaging controller controlling the angle-adjustment mirror to adjust the angle of the plane wave sequentially, forming a time-gated reflection matrix by using the interference waves obtained by the camera module in accordance with each angle of the plane wave, and imaging the target object based on the time-gated reflection matrix.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.