Strain gauge sensor accelerometer with improved accuracy
US11085945B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 19, 2019 |
| Grant date | Aug 10, 2021 |
| Priority date | — |
| Expiry date | Jan 30, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0877
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An MEMS or NEMS accelerometer adapted to measure an acceleration along a sensing axis includes a substrate featuring a plane; a mass having a central zone and suspended relative to the substrate; a single lever arm comprising: a first end connected to the substrate by means of a first connection adapted to allow rotation of the lever arm about a rotation axis perpendicular to the sensing axis, and a second end connected to the mass by means of a second connection adapted to transmit movement in translation of the mass to the lever arm whilst allowing rotation of the lever arm about the rotation axis; the second end of the lever arm being disposed at the level of the central zone of the mass; at least one strain gauge comprising: a first end connected to the substrate, and a second end connected to the lever arm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.