Patent · US Active

System combination of a particle beam system and a light-optical system with collinear beam guidance, and use of the system combination

US11087955B2 · kind B2 · utility

2Cited by

9References

28Claims

0Family size

Assignee

Carl Zeiss MultiSEM GmbH · DE

Inventors

Dirk Zeidler · Oberkochen, DE
Michael Schall · Oberkochen, DE
Joerg Jacobi · Herbrechtingen, DE
Michel Le Maire · Oberkochen, DE

Key dates

Filing date	Jul 27, 2020
Grant date	Aug 10, 2021
Priority date	—
Expiry date	Jul 27, 2040

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/28
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A system combination includes a particle beam system and a light-optical system. The particle beam system can be an individual particle beam system or a multiple particle beam system. A light entry mechanism can provided at a branching site of a beam tube arrangement within a beam switch. A light beam of the light-optical system can enter into the beam tube arrangement through the light entry mechanism such that the light beam impinges, in substantially collinear fashion with particle radiation, on an object to be inspected. Parts of the light-optical beam path and parts of the particle-optical beam path can extend parallel to one another or overlap with one another. This arrangement can allow light of the light-optical system to be incident in perpendicular fashion on an object to be inspected, optionally without impairing the particle-optical resolution of the particle beam system.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.