Methods and systems for centrifugal casting of polymer polish pads and polishing pads made by the methods
US11090778B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 1, 2013 |
| Grant date | Aug 17, 2021 |
| Priority date | — |
| Expiry date | Jun 24, 2033 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB29C41/042
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A method for making a polishing pad includes rotating a cylinder about a central axis. The cylinder encloses in an interior space a polymer mixture. The method also includes forming the polishing pad from at least some of a polymer formed after the polymer mixture has gelled. The rotating of the cylinder may be continued until the polymer has cured. The method may include forming at least two distinct layers in the polishing pad by casting and gelling sequentially at least two different polymer mixtures. A system for manufacturing a polishing pad includes a centrifugal caster adapted to rotate. A polishing pad made by a method is provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.