Sensor element and thermal flow sensor for determining a physical variable of a measurement medium
US11092471B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 12, 2018 |
| Grant date | Aug 17, 2021 |
| Priority date | — |
| Expiry date | Apr 2, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01K7/18
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present disclosure resides in a sensor element for determining a physical, measured variable of a measured medium, comprising: a planar substrate; a functional layer applied on a surface of the substrate; a passivating layer applied on the functional layer; a metal connecting layer applied on the surface of the passivating layer such that the passivating layer is completely covered; and a metal platelet applied on the surface of the metal connecting layer such that no contact can occur between the passivating layer and the measured medium, as well as residing in a thermal flow sensor, which has at least two such sensor elements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.