Patent · US Active

Semiconductor storage device

US11094698B2 · kind B2 · utility

5Cited by
10References
21Claims
0Family size

Assignee

Inventor

Key dates

Filing dateSep 14, 2020
Grant dateAug 17, 2021
Priority date
Expiry dateSep 14, 2040

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10B12/488
  • WIPO fieldComputer technology
  • WIPO sectorElectrical engineering

Abstract

A semiconductor storage device according to the present embodiment includes a plurality of first wires provided above a surface of a semiconductor substrate to extend in a first direction, and a plurality of second wires provided above the first wires to extend in a second direction crossing the first direction. A plurality of capacitor elements are arranged every other intersection region among intersection regions between the first wires and the second wires as viewed from above the surface of the semiconductor substrate. A plurality of transistors are provided above the capacitor elements to correspond thereto, respectively. A first distance between two of the capacitor elements, which are adjacent to each other in the first direction, is narrower than a second distance between two of the capacitor elements, which are adjacent to each other in the second direction.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.