Patent · US Active

Variable resistance memory device and method of fabricating the same

US11094745B2 · kind B2 · utility

3Cited by
7References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 27, 2019
Grant dateAug 17, 2021
Priority date
Expiry dateSep 24, 2039

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10N70/883

Abstract

A variable resistanvce memory device may include a plurality of first conductive lines extending in a first direction, a plurality of second conductive lines extending in a second direction, a plurality of memory cells, each memory cell at a respective intersection, with respect to a top down view, between a corresponding one of the first conductive lines and a corresponding one of the second conductive lines, each memory cell comprising a variable resistance structure and a switching element sandwiched between a top electrode and a bottom electrode, and a first dielectric layer filling a space between the switching elements of the memory cells. A top surface of the first dielectric layer is disposed between bottom and top surfaces of the top electrodes of the memory cells.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.