Method for fabricating a membrane device including membrane having wrinkles formed along trenches
US11097943B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 6, 2019 |
| Grant date | Aug 24, 2021 |
| Priority date | — |
| Expiry date | Mar 6, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D30/796
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A membrane device includes a trench substrate having trenches and a membrane having wrinkles. The membrane is not bonded to the trenches of the trench substrate but is bonded to the surface of the trench substrate in the shoulders of the trenches. Hills and valleys are alternately arranged in the membrane along the trenches. The membrane device can be used in various applications (for example, sensors) based on variations in the electrical properties of the membrane caused by a change in the shape of the wrinkles (a change in the strain) of the membrane in response to a change in the internal or external environment of the trenches.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.