Feedback correction in sub-resonant tapping mode of an atomic force microscope
US11099210B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 30, 2018 |
| Grant date | Aug 24, 2021 |
| Priority date | — |
| Expiry date | Sep 2, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q10/065
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of carrying out sub-resonant tapping in an atomic force microscope includes causing a probe that is disposed above a sample to be translated in a direction parallel to a horizontal plane defined by the sample and to oscillate in a vertical direction that is perpendicular to the horizontal plane about an equilibrium line that is separated from the horizontal plane by a vertical offset. As a result, the probe repeatedly taps a surface of the sample. Each tap begins with a first contact of the probe on the surface followed by a progressive increase in force exerted by the sample on the probe until a peak force is attained. The vertical offset is controlled by relying at least in part on a feature other than the peak force as a basis for controlling the vertical offset.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.