Patent · US Active

Target and process for producing a target

US11101116B2 · kind B2 · utility

0Cited by
3References
8Claims
0Family size

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Key dates

Filing dateJun 30, 2015
Grant dateAug 24, 2021
Priority date
Expiry dateJun 30, 2035

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J37/3426
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

A target includes a target plate and a stabilizing layer which is joined to the rear side of the target plate. The stabilizing layer was produced by high-kinetic-energy spraying of stabilizing material onto the target plate. A process for producing a target is also provided.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.