Target and process for producing a target
US11101116B2 · kind B2 · utility
0Cited by
3References
8Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Jun 30, 2015 |
| Grant date | Aug 24, 2021 |
| Priority date | — |
| Expiry date | Jun 30, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3426
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A target includes a target plate and a stabilizing layer which is joined to the rear side of the target plate. The stabilizing layer was produced by high-kinetic-energy spraying of stabilizing material onto the target plate. A process for producing a target is also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.