Extraction system for charged secondary particles for use in a mass spectrometer or other charged particle device
US11101123B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 17, 2017 |
| Grant date | Aug 24, 2021 |
| Priority date | — |
| Expiry date | May 11, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2527
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention is directed to mass spectrometer comprising an extraction system for secondary ions. The system comprises: an inner spherical deflecting sector; an outer spherical deflecting sector; a deflecting gap formed between the sectors; a housing in which the sectors are arranged. The deflecting sectors (42; 44) are biased at retarding gap (46). The system further comprises an exit disc electrode with an exit through hole centered about the exit axis, the intermediate electrode being biased at an intermediate voltage between the voltage of the housing and the average voltage of the sectors. The trajectories of the secondary ions become more parallel to the exit axis and become closer to the axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.