Patent · US Active

Back side illumination image sensors and electronic device including the same

US11101314B2 · kind B2 · utility

1Cited by
11References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 29, 2020
Grant dateAug 24, 2021
Priority date
Expiry dateFeb 20, 2040

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10F39/8063

Abstract

In some example embodiments, a back side illumination (BSI) image sensor may include a pixel configured to generate electrical signals in response to light incident on a back side of a substrate. In some example embodiments, the pixel includes, a photodiode, a device isolation film adjacent to the photodiode, a dark current suppression layer above the photodiode, a light shield grid above the photodiode and including an opening area of 1 to 15% of an area of the pixel, a light shielding filter layer above the light shield grid, a planarization layer above the light shielding filter layer, a lens above the planarization layer, and/or an anti-reflective film between the photodiode and the lens.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.