Patent · US Active

Spacer for self-aligned mesa

US11101418B1 · kind B1 · utility

2Cited by
1References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 10, 2019
Grant dateAug 24, 2021
Priority date
Expiry dateNov 3, 2039

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10H20/819

Abstract

Described are light emitting apparatus with self-aligned elements and techniques for manufacturing such light emitting apparatus. In certain embodiments, a light emitting apparatus includes a mesa formed by a plurality of semiconductor layers. The light emitting apparatus further includes an electrical contact on one of the semiconductor layers and a spacer around the electrical contact. The spacer is aligned with respect to the electrical contact, which permits etching around the spacer to define the shape of the mesa in such a way that the mesa is also aligned with respect to the electrical contact. In particular, the electrical contact is substantially centered between opposing sidewalls of the mesa.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.