Shock caging features for MEMS actuator structures

US11104570B2 · kind B2 · utility

Assignee

• MEMS DRIVE (NANJING) CO., LTD. · CN

Inventors

• Xiaolei Liu · Los Angeles, US
• Matthew Ng · Rosemead, US
• Robert J. Calvet · Pasadena, US
• Gerardo Morabito · Arcadia, US

Key dates

• Filing date: Apr 16, 2019
• Grant date: Aug 31, 2021
• Expiry date: Apr 16, 2039

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2203/0136
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

Caging structures are disclosed for caging or otherwise reducing the mechanical shock pulse experienced by MEMS device beam structures during events that may cause mechanical shock to the MEMS device. The caging structures at least partially surround the beam such that they limit the motion of the beam in a direction perpendicular to the beam's longitudinal axis, thereby reducing stress on the beam during a mechanical shock event. The caging structures may be used in combination with mechanical shock-resistant beams.