Hybrid systems and methods for characterizing stress in chemically strengthened transparent substrates

US11105612B2 · kind B2 · utility

Assignee

• CORNING INCORPORATED · US

Inventors

• Ryan Claude Andrews · Elmira, US
• Pierre Michel Bouzi · Horseheads, US
• William John Furnas · Elmira, US
• Jeremiah Robert Jacobson · Corning, US
• Glenn Abram Newcomer · Pine City, US
• Evan Lewis Olson · Elmira, US
• Babak Robert Raj · Elmira, US
• Rostislav Vatchev Roussev · Corning, US
• Viktor Stepanov · Corning, US
• Nathaniel David Wetmore · Elmira, US

Key dates

• Filing date: Mar 20, 2020
• Grant date: Aug 31, 2021
• Expiry date: Mar 20, 2040

Classification

• Technology area (CPC G): Physics
• CPC primary: G01J4/02
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The hybrid measurement system includes an evanescent prism coupling spectroscopy (EPCS) sub-system and a light-scattering polarimetry (LSP) sub-system. The EPCS sub-system includes an EPCS light source optically coupled to an EPCS detector system through an EPCS coupling prism. The LSP sub-system includes an LSP light source optically coupled to an optical compensator, which in turn is optically coupled to a LSP detector system via a LSP coupling prism. A support structure supports the EPCS and LSP coupling prisms to define a coupling prism assembly, which supports the two prisms at a measurement location. Stress measurements made using the EPCS and LSP sub-systems are combined to fully characterize the stress properties of a transparent chemically strengthened substrate. Methods of processing the EPCS and LSP measurements to improve measurement accuracy are also disclosed.