Crack detecting and monitoring system for an integrated circuit

US11105846B1 · kind B1 · utility

Assignee

• GLOBALFOUNDRIES U.S. Inc. · US

Inventors

• Nicholas A. Polomoff · Irvine, US
• Dirk Breuer · Dresden, DE
• Eric D. Hunt-Schroeder · South Burlington, US
• Bernhard J. Wunder · Williston, US
• Dewei Xu · Markham, CA

Key dates

• Filing date: Apr 2, 2020
• Grant date: Aug 31, 2021
• Expiry date: Apr 2, 2040

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R31/2881
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Embodiments of the disclosure provide a system for detecting and monitoring a crack in an integrated circuit (IC), including: at least one electrically conductive perimeter line (PLINE) extending about, and electrically isolated from, a protective structure formed in an inactive region of the IC, wherein an active region of the IC is enclosed within the protective structure; a circuit for sensing a change in an electrical characteristic of the at least one PLINE, the change in the electrical characteristic indicating a presence of a crack in the inactive region of the IC; and a connecting structure for electrically coupling each PLINE to the sensing circuit.