Energy-sensitive composition, cured product, and pattern forming method
US11106132B2 · kind B2 · utility
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Key dates
| Filing date | Apr 22, 2019 |
| Grant date | Aug 31, 2021 |
| Priority date | — |
| Expiry date | Jul 11, 2039 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC08G77/60
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
An energy-sensitive composition including at least one of a silane compound monomer capable of forming a polysilane compound, a silane compound oligomer and the polysilane compound, and a base generator (B) represented by the following formula (1):
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.