Optical verification system and methods of verifying micro device transfer
US11107208B2 · kind B2 · utility
0Cited by
6References
19Claims
0Family size
Inventors
Key dates
| Filing date | Sep 24, 2019 |
| Grant date | Aug 31, 2021 |
| Priority date | — |
| Expiry date | Nov 14, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
An optical verification method and mass transfer system described. In an embodiments, a mass transfer sequence may be accompanied by optical imaging and inspection to detect pick and place errors. The optical imaging and inspection techniques may be performed in-situ.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.