Patent · US Active

Hybrid system including photonic and electronic integrated circuits and cooling plate

US11107799B1 · kind B1 · utility

11Cited by
0References
31Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 20, 2019
Grant dateAug 31, 2021
Priority date
Expiry dateFeb 24, 2040

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/19107
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Techniques disclosed herein relate generally to integrating photonic integrated circuits and electronic integrated circuits in a same package. A device includes a semiconductor substrate and a die stack on the semiconductor substrate. The die stack includes a photonic integrated circuit (PIC) die and an electronic integrated circuit (EIC) die. The PIC die includes a PIC substrate and a photonic integrated circuit formed on the PIC substrate. The EIC die includes an EIC substrate and an electronic integrated circuit formed on the EIC substrate. The EIC die and the PIC die are bonded such that the PIC substrate and the EIC substrate are disposed on opposing sides of the die stack. The PIC substrate is bonded to the semiconductor substrate. The device also includes a cooling plate bonded to the EIC substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.