Sealed cavity structures with a planar surface
US11107884B2 · kind B2 · utility
1Cited by
54References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 12, 2019 |
| Grant date | Aug 31, 2021 |
| Priority date | — |
| Expiry date | Aug 12, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D64/687
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present disclosure relates to semiconductor structures and, more particularly, to sealed cavity structures having a planar surface and methods of manufacture. The structure includes a cavity formed in a substrate material and which has a curvature at its upper end. The cavity is covered with epitaxial material that has an upper planar surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.