Patent · US Active

Semiconductor device and method for manufacturing same

US11107911B2 · kind B2 · utility

1Cited by
2References
17Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 30, 2019
Grant dateAug 31, 2021
Priority date
Expiry dateJan 16, 2040

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D62/157

Abstract

A semiconductor device includes an inversion type semiconductor element, which has: a substrate; a drift layer; a saturation current suppression layer; a current dispersion layer; a base region; a source region; a connection layer; a plurality of trench gate structures; an interlayer insulation film; a source electrode; and a drain electrode. A channel region is provided in a portion of the base region in contact with each trench gate structure by applying a gate voltage to the gate electrode and applying a normal operation voltage as a drain voltage to the drain electrode; and a current flows between the source electrode and the drain electrode through the source region and the JFET portion.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.