High purity trisilylamine, methods of making, and use

US11111256B2 · kind B2 · utility

Assignee

• JIANGSU NATA OPTO-ELECTRONIC MATERIALS CO. LTD. · CN

Inventors

• Barry Ketola · Freeland, US
• Jesse A. Maddock · Midland, US
• Brian D. Rekken · Midland, US
• Michael Telgenhoff · Midland, US
• Xiaobing Zhou · Midland, US

Key dates

• Filing date: Dec 16, 2016
• Grant date: Sep 7, 2021
• Expiry date: Feb 9, 2038

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B01J2531/002
• WIPO field: Organic fine chemistry
• WIPO sector: Chemistry

Abstract

A composition, comprising: trisilylamine and less than 5 ppmw of halogen. A method of making a silylamine comprising combining ammonia and a compound comprising aminosilane functionality, where the compound comprising aminosilane functionality is according to formula (I) R1 N(R2)a(SiH3)2−a (I), where R1 is an organic polymer, a C-1-20 hydrocarbyl group or —SiR331, where R3 is C1-6 hydrocarbyl, R2 is a C-1-20 hydrocarbyl group, H, or —SiR331, where R3 is as defined above, subscript a is 0 or 1, provided that R1 and R2 may be the same or different except if R1 is phenyl, R2 is not phenyl, under sufficient conditions to cause a reaction to form a silylamine and a byproduct.