Vacuum valve comprising a force sensor
US11112029B2 · kind B2 · utility
0Cited by
8References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 19, 2018 |
| Grant date | Sep 7, 2021 |
| Priority date | — |
| Expiry date | May 20, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L1/22
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
The invention relates to a vacuum valve comprising a sensor assembly with at least one force sensor which has a deformation-sensitive element. The sensor assembly is designed such that a measurement signal relating to a compression of the seal (TO) which lies between a first and a second seal surface, said compression being produced by the first and the second seal surface, is detected by means of the sensor assembly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.