Thermal flowmeter
US11112286B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 27, 2017 |
| Grant date | Sep 7, 2021 |
| Priority date | — |
| Expiry date | May 9, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01K2205/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A thermal flowmeter includes a plurality of measuring units for stabilizing air flowing in a sub-passage, and improves noise performance or a pulsation characteristic of a flow rate sensor. The thermal flowmeter includes a flange fixed to an attachment part of a main passage, a sub-passage takes in a part of measured gas flowing in the main passage, a flow rate measuring unit measures a flow rate of the measured gas in the sub-passage, a circuit component controls the flow rate measuring unit, and the flow rate measuring unit and an electronic component are mounted on a circuit substrate. The sub-passage is formed in a substrate of the circuit substrate, the sub-passage on a surface side of the circuit substrate and a second space on a rear surface side are separated by the circuit substrate, and a pressure measuring unit and the circuit component are arranged in the second space.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.