Gas analyzer and gas analyzing device
US11112340B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 22, 2017 |
| Grant date | Sep 7, 2021 |
| Priority date | — |
| Expiry date | Apr 18, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/0427
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present disclosure relates to a gas analyzer for measuring density and/or viscosity of a medium. The gas analyzer includes a connection panel having first and second media openings, each of which extends from a first surface to a second surface of the connection panel. A sensor panel is joined together with the connection panel on a first joint plane, and a cover panel is joined together with the sensor panel on a second joint plane, on a sensor panel face facing away from the connection panel. The cover panel has a cover panel cavity which communicates with the first and second media openings, and the sensor panel has at least one oscillator cavity which communicates with the first and second media openings. The sensor panel has a micromechanical oscillator arranged in the oscillator cavity and excitable to mechanically vibrate perpendicularly to the joint planes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.