Patent · US Active

Method and tip substrate for scanning probe microscopy

US11112427B2 · kind B2 · utility

0Cited by

5References

13Claims

0Family size

Assignee

IMEC VZW · BE

Inventors

Thomas Hantschel · Houtvenne, BE
Hugo Bender · Edegem, BE
Kristof Paredis · Oud-Heverlee, BE
Antti Kanniainen · Leuven, BE

Key dates

Filing date	Oct 13, 2020
Grant date	Sep 7, 2021
Priority date	—
Expiry date	Oct 13, 2040

Classification

Technology area (CPC G)Physics
CPC primaryG01Q80/00
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The disclosure is related to a method for performing SPM measurements, wherein a sample is attached to a cantilever and scanned across a tip. The tip is one of several tips present on a substrate comprising at least two different types of tips on its surface, thereby enabling performance of multiple SPM measurements requiring a different type of tip, without replacing the cantilever. The at least two different types of tips are different in terms of their material, in terms of their shape or size, and/or in terms of the presence or the type of active or passive components mounted on or incorporated in the substrate, and associated to tips of one or more of the different types. The disclosure is equally related to a substrate comprising a plurality of tips suitable for use in the method of the disclosure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.