Diamond coated antireflective window system and method
US11112539B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 23, 2019 |
| Grant date | Sep 7, 2021 |
| Priority date | — |
| Expiry date | Mar 10, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B1/14
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A system and method for diamond based multilayer antireflective coating for optical windows are provided. An antireflective coatings for optical windows may include an optical grade silicon substrate, a first polycrystalline diamond film on the silicon substrate, a germanium film on the first polycrystalline diamond film, a fused silica film on the germanium film; and a second polycrystalline diamond film on the fused silica film. A method of fabricating a diamond based multilayer antireflective coating may include the steps of cleaning and seeding an optical substrate, forming a first diamond layer on the optical substrate, forming a germanium layer on the first diamond layer, forming a fused silica layer on the germanium layer, cleaning and seeding the germanium layer, and forming a second diamond layer on the germanium layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.