Thermal management in high power RF MEMS switches
US11114265B2 · kind B2 · utility
4Cited by
4References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 14, 2016 |
| Grant date | Sep 7, 2021 |
| Priority date | — |
| Expiry date | Dec 31, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2239/072
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present disclosure generally relates to a mechanism for making a MEMS switch that can switch large electrical powers. Extra landing electrodes are employed that provide added electrical contact along the MEMS device so that when in contact current and heat are removed from the MEMS structure close to the hottest points.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.