Semiconductor device
US11114445B2 · kind B2 · utility
2Cited by
3References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 23, 2020 |
| Grant date | Sep 7, 2021 |
| Priority date | — |
| Expiry date | Jun 23, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10B41/50
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A semiconductor device includes a substrate having an active pattern, a cell region on the substrate and having a cell circuit, and a core region on the substrate having a peripheral circuit. In plan view, the active pattern on the core region includes a plurality of corners. Each of the corners has a rounding index that is equal to or less than about 15 nm. The rounding index is a distance between a respective tip of each of the corners and a right-angled corner.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.