Apparatus for collecting by-product of semiconductor manufacturing process
US11117086B2 · kind B2 · utility
6Cited by
1References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 7, 2019 |
| Grant date | Sep 14, 2021 |
| Priority date | — |
| Expiry date | Feb 12, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67207
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The apparatus for collecting by-products of the present disclosure includes: a cylindrical housing that has a top plate having a gas inlet and a bottom plate having a gas outlet extending and protruding inside the housing, and receives and then discharges an exhaust gas flowing inside; and a flow path change-type vertical internal collection tower that is installed in a hanging state inside the housing and includes a disc type collector, a diffusion plate, a cylindrical collector, and a cylindrical filter collector for collecting by-products in an exhaust gas flowing inside.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.