MEMS device and electronics apparatus
US11117797B2 · kind B2 · utility
0Cited by
1References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 8, 2016 |
| Grant date | Sep 14, 2021 |
| Priority date | — |
| Expiry date | Apr 13, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R2201/02
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
The present invention discloses a MEMS device and an electronics apparatus. The MEMS device comprises: a substrate; a MEMS element placed on the substrate; a cover encapsulating the MEMS element together with the substrate; and a port for the MEMS element to access outside, wherein the port is provided with a filter which has mesh holes and includes electrets to prevent particles from entering into the MEMS element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.