Evaporation device and evaporation method
US11118259B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jul 4, 2018 |
| Grant date | Sep 14, 2021 |
| Priority date | — |
| Expiry date | Jul 4, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/164
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The present disclosure provides an evaporation device and an evaporation method. The evaporation device includes: an evaporation chamber; a plurality of spaced conductive baffles disposed in the evaporation chamber and dividing the evaporation chamber into a plurality of evaporation sub-chambers, the conductive baffles configured to carry charges of a first polarity; an evaporation source disposed in at least one of the evaporation sub-chambers; and a particle charging circuit disposed in at least one of the evaporation sub-chambers. The particle charging circuit is configured to control evaporation material particles generated from the evaporation source in at least one of the evaporation sub-chambers to have charges of the first polarity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.