Method for reducing surface roughness

US11118268B2 · kind B2 · utility

Assignee

• General Electric Company · US

Inventors

• Wusheng Xu · Shanghai, CN
• Laura Cerully Dial · Clifton Park, US
• Lawrence Bernard Kool · Clifton Park, US
• Dalong Zhong · Shanghai, CN
• Hong Zhou · Shanghai, CN

Key dates

• Filing date: Nov 30, 2018
• Grant date: Sep 14, 2021
• Expiry date: Nov 30, 2038

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/32134
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A surface of an article is modified by aluminizing an initial surface at a first temperature to form a first aluminized layer and a sublayer, removing at least a portion of the first aluminized layer, aluminizing the sublayer at a second temperature to form a second aluminized layer, and finally removing at least a portion of the second aluminized layer to form a processed surface. The second temperature is less than the first temperature and a roughness of the processed surface is less than the roughness of the initial surface.