Patent · US Active

Beam blanking device for a multi-beamlet charged particle beam apparatus

US11120965B2 · kind B2 · utility

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20Claims

0Family size

Assignee

ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH · DE

Inventors

Benjamin John Cook · Munich, DE
Eoin Horgan · Limerick, IE

Key dates

Filing date	Dec 4, 2019
Grant date	Sep 14, 2021
Priority date	—
Expiry date	Feb 19, 2040

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/0437
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A beam blanking device for a multi-beamlet charged particle beam apparatus is provided. The beam blanking device includes a first blanking unit, a second blanking unit and a third blanking unit. The first blanking unit includes a first blanking electrode and a first aperture. The second blanking unit includes a second blanking electrode and a second aperture. The third blanking unit includes a third blanking electrode and a third aperture. The beam blanking device includes a common electrode forming a first counter electrode for the first blanking electrode, a second counter electrode for the second blanking electrode and a third counter electrode for the third blanking electrode. The first blanking unit, the second blanking unit and the third blanking unit are arranged in a planar array and define a plane of the planar array. The first blanking electrode is arranged for generating a first electric field between the first blanking electrode and the common electrode in the first aperture for deflecting a first beamlet of the multi-beamlet charged particle beam apparatus into a first deflection direction. The second blanking electrode is arranged for generating a second electric fiel…

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.