Patent · US Active

Voltage-controllable capacitor comprising a ferroelectric layer and method for producing the voltage-controllable capacitor comprising a ferroelectric layer

US11121266B2 · kind B2 · utility

0Cited by

1References

9Claims

0Family size

Assignee

Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

Thomas Kaempfe · Dresden, DE
Patrick Polakowski · Dresden, DE
Konrad Seidel · Dresden, DE

Key dates

Filing date	Aug 2, 2019
Grant date	Sep 14, 2021
Priority date	—
Expiry date	Aug 2, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/0228
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

The present invention relates to a voltage-controllable capacitor comprising a first electrode layer (4) composed of a non-ferroelectric material, said first electrode layer being applied on a substrate (6), a ferroelectric interlayer (3) having a thickness that is less than the thickness of the first electrode layer (4), and a second electrode layer (2) composed of a non-ferroelectric material. The ferroelectric interlayer (3) is arranged between the first electrode layer (4) and the second electrode layer (2).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.