Junction fabrication method for forming qubits
US11121304B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 14, 2019 |
| Grant date | Sep 14, 2021 |
| Priority date | — |
| Expiry date | Nov 14, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N69/00
Abstract
A method of making a Josephson junction for a superconducting qubit includes providing a substructure having a surface with first and second trenches perpendicular to each other defined therein. The method further includes evaporating a first superconducting material to deposit the first superconducting material and evaporating a second superconducting material to deposit the second superconducting material in the first trench to provide a first lead, and forming an oxidized layer on the first and second superconducting materials. The method includes evaporating a third superconducting material at an angle substantially perpendicular to the surface of the substructure to deposit the third superconducting material in the second trench without rotating the substructure to form a second lead. A vertical Josephson junction is formed at the intersection of the first and second trenches electrically connected through the first lead and through the second lead.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.