Patent · US Active

Microelectronic structures with suspended lithium-based thin films

US11121305B2 · kind B2 · utility

0Cited by
10References
18Claims
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Key dates

Filing dateDec 28, 2017
Grant dateSep 14, 2021
Priority date
Expiry dateJul 8, 2039

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10N30/877
  • WIPO fieldBasic communication processes
  • WIPO sectorElectrical engineering

Abstract

In one aspect, a microelectronic device comprises: a suspended lithium-based thin film; and one or more electrodes disposed on the suspended lithium-based thin film, wherein the one or more electrodes comprises one or more fingers, and a width of at least one outer finger of the one or more fingers is smaller than a width of at least one inner finger of the one or more fingers.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.