Organic vapor jet print head with redundant groups of depositors
US11121320B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 1, 2019 |
| Grant date | Sep 14, 2021 |
| Priority date | — |
| Expiry date | Jun 20, 2039 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/549
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Embodiments of the disclosed subject matter provide a device including a micronozzle array having separate redundant groups of depositors that each include a delivery aperture disposed between two exhaust apertures. The device may include a first row of depositors of a first redundant group, each of which may be connected in parallel to first common delivery lines and first common exhaust lines. The device may include a second row of depositors of a second redundant group, each of which is connected in parallel to second common delivery and second common exhaust lines. The first row of depositors and the second row of depositors may operate independently from one another. The device may be disposed within a deposition chamber and in proximity of a substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.