Patent · US Active

Manufacturing method for a micromechanical window structure and corresponding micromechanical window structure

US11124412B2 · kind B2 · utility

0Cited by

1References

7Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Joerg Muchow · Reutlingen, DE
Rainer Straub · Entringen, DE
Stefan Pinter · Reutlingen, DE

Key dates

Filing date	Feb 13, 2020
Grant date	Sep 21, 2021
Priority date	—
Expiry date	Feb 13, 2040

Classification

Technology area (CPC G)Physics
CPC primaryG02B26/0833
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A manufacturing method for a micromechanical window structure including the steps: providing a substrate, the substrate having a front side and a rear side; forming a first recess on the front side; forming a coating on the front side and on the first recess; and forming a second recess on the rear side, so that the coating is at least partially exposed, whereby a window is formed by the exposed area of the coatings.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.