Apparatus and method to measure semiconductor optical absorption using microwave charge sensing
US11125700B2 · kind B2 · utility
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Key dates
| Filing date | Aug 19, 2019 |
| Grant date | Sep 21, 2021 |
| Priority date | — |
| Expiry date | Jan 31, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B6/64
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A time-resolved microwave reflectance apparatus comprises a pulsed or modulated optical source that irradiates a semiconductor sample with an excitation pump beam, a microwave oscillator that irradiates the sample with a continuous beam of microwaves, and a microwave detector that detects the microwaves reflected by the sample. Therefore, charge detection, rather than conventional absorption measurements (that detect the loss of photons), can be used to extract the absorption coefficient and band edge of a semiconductor material.
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