Probe and manufacturing method of probe for scanning probe microscope
US11125775B1 · kind B1 · utility
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2References
13Claims
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Key dates
| Filing date | Sep 1, 2020 |
| Grant date | Sep 21, 2021 |
| Priority date | — |
| Expiry date | Sep 1, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q70/16
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A manufacturing method of a probe according to the present embodiment is used to manufacture a probe for a scanning probe microscope. An insulating film is formed on the surface of a probe provided on a base. Metal ions are implanted into the insulating film. An electric field is applied to the insulating film to concentrate the metal ions in the insulating film at a tip of the probe and form a metallic filament in the insulating film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.